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李吉, 张霞, 冯翊, 廖昌, 张杰, 尹勇明, 孟鸿. 亿博体育登陆[J]. 中国光学(中英文). doi: 10.37188/CO.EN-2023-0029
引用本文: 李吉, 张霞, 冯翊, 廖昌, 张杰, 尹勇明, 孟鸿. 亿博体育登陆[J]. 中国光学(中英文). doi: 10.37188/CO.EN-2023-0029
LI Ji, ZHANG Xia, FENG Yi, LIAO Chang, ZHANG Jie, YIN Yong-ming, MENG Hong. 亿博体育登陆app下载中心[J]. Chinese Optics. doi: 10.37188/CO.EN-2023-0029
Citation: LI Ji, ZHANG Xia, FENG Yi, LIAO Chang, ZHANG Jie, YIN Yong-ming, MENG Hong. 亿博体育登陆app下载中心[J]. Chinese Optics. doi: 10.37188/CO.EN-2023-0029

亿博体育登陆

详细信息
  • 中图分类号:TP394.1;TH691.9

亿博体育登陆app下载中心

doi: 10.37188/CO.EN-2023-0029
Funds:Supported by National Natural Science Foundation of China (No. 62205058); Guangdong Basic and Applied Basic Research Foundation (No. 2021A1515110085); Shenzhen Fundamental Research Program (No. JSGG20220831103402005)
More Information
    Author Bio:

    LI Ji (1988—), Male, born in Huanggang, Hubei province. In 2013, he received his master's degree from South China University of Technology. Currently, he is a PhD candidate at Peking University. He is mainly engaged in research and development of display materials. E-mail: [email protected]

    YIN Yong-ming (1989—), male, born in Chenzhou, Hunan province. He obtained his degrees for Bachelor and Master from Jilin University, and then undertook his Ph.D. studies at Peking University from 2016 to 2020. Currently, he serves as an associate professor at Shenzhen MSU-BIT University. His research interests are in optoelectronics materials and devices for display applications. E-mail: [email protected]

    MENG Hong (1966—), male, born in Huayin city, Shanxi province. Chair Professor, School of Advanced Materials, Shenzhen Graduate School, Peking University. He received his Ph. D. from the University of California, Los Angeles in 2002. His research interests are in organic optoelectronics materials and devices. E-mail: [email protected]

    Corresponding author: [email protected]; [email protected]
  • 摘要:

    TFT-LCD产业正朝着高效率、低成本的方向发展。在TFT-LCD制造过程中,发现不同的光刻胶需要不同的真空干燥时间。为了减少制造时间,提高面板成品率,有必要明确影响真空时间的因素。本文探讨了抽运时间与光刻胶材料性能的关系。发现光刻胶的热稳定性与抽运时间的关系可以忽略不计。光刻胶的致密性和疏水性与真空干燥时间密切相关。致密性和高疏水性可以有效避免水蒸气在制造过程中侵入和储存在光刻胶中,减少泵送次数。总的来说,这项工作可以为未来TFT-LCD工业新型光刻胶的开发提供一定的参考。

  • Figure 1. Molecular structures of different monomers: G6-AG-001, G6-AG-002, DPEA-12 and DPCA-60.

    Figure 2. Three possible causes affecting the gas release from CFs. (a) Outgas from CFs; (b) low compactness and (c) low hydrophobicity of CFs

    Figure 3. Thermogravimetric analysis of PT-1 and PT-2. The samples were baked at 230 °C for 50 min, 210 °C for 60 min and 230 °C for 60 min, sequentially

    Figure 4. (a) The molecular structures of P1 and P2. (b) The schematic illustration of the porous structures. The red bars represent the crosslinking and the dotted circles represent the voids. P1 has large voids and P2 is more compact. (c) SEM images of sample A and sample B. (d) Pumping time of the two samples

    Figure 5. (a) Hydrophilic group and hydrophobic group in M2 and M3. (b) Contact angles of three samples, Sample E being the most hydrophobic. (c) Pumping time of three samples. (d) TGA curves of three pretreated samples by high temperature and humidity

    Figure 6. Optical morphology of Sample F

    Figure 7. Color image of fruits displayed on a TFT-LCD prototype using sample F as a green CF

    Table  1. Compositions of CFs

    Compositions Sample
    PT-1 PT-2 A B C D E F
    Color Paste G58+Y138
    Polymer
    (wt%)
    P1 P1 P1 50% P1
    50% P2
    P1 P1 P1 50% P1
    50% P2
    Monomers G6-AG-001
    DPCA-60
    G6-AG-001 G6-AG-001
    DPEA-12
    G6-AG-001
    DPEA-12
    G6-AG-001 G6-AG-001
    G6-AG-002
    G6-AG-001
    DPCA-60
    G6-AG-001
    DPCA-60
    Polymer/Monomer (wt%) 40%/60% 40%/60% 35%/65% 35%/65% 35%/65% 35%/65% 35%/65% 35%/65%
    Photoinitiator (wt%) 0.15%
    Additive (wt%) 0.15%
    Solvent PGMEA+MBA
    下载: 导出CSV

    Table  2. Pumping time of vacuum drying and mass loss

    Items CF
    PT-1 PT-2
    Pumping time/s 62.3 65.8
    Mass loss (40−215 min) 2.46% 1.50%
    Mass loss (0−30 min) 0.20% 0.85%
    下载: 导出CSV

    Table  3. The thickness and shrinkage of the photoresist layer before and after UV exposure

    Sample Items
    d 1/μm d 2/μm Shrinkage (%) Pumping time/s
    Sample A 2.04 2.04 0.37 7
    Sample B 2.17 2.15 0.76 5.5
    下载: 导出CSV

    Table  4. Data of the three samples CE

    Sample Monomer Proportion Contact angle/(°) Developing time/s Property Mass loss Pumping time/s
    C M1 100% 49.4 24 / 9.7% 7
    D M1+M2 70%+30% 48.6 21 More hydrophilic 23.4% 7.5
    E M1+M3 70%+30% 51.3 29 More hydrophobic 3.5% 3
    下载: 导出CSV

    Table  5. Optical and VCD characteristics of reference CF and sample F

    Item Reference CF Sample F
    Rx 0.642 0.642
    Ry 0.337 0.337
    Gx 0.301 0.301
    Gy 0.607 0.607
    Bx 0.150 0.149
    By 0.07 0.068
    Wx 0.276 0.278
    Wy 0.297 0.301
    Tr% 5.85% 5.89%
    NTSC 70.8% 71%
    Pumping time/s 62.3 62
    下载: 导出CSV
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  • 收稿日期: 2023-11-15
  • 录用日期: 2023-12-14
  • 网络出版日期: 2024-01-31

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