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亿博体育登陆注册网站

谭满清, 游道明, 郭文涛, 刘维华

谭满清, 游道明, 郭文涛, 刘维华. 亿博体育登陆注册网站[J]. 中国光学(中英文), 2023, 16(1): 61-75. doi: 10.37188/CO.2022-0022
引用本文: 谭满清, 游道明, 郭文涛, 刘维华. 亿博体育登陆注册网站[J]. 中国光学(中英文), 2023, 16(1): 61-75. doi: 10.37188/CO.2022-0022
TAN Man-qing, YOU Dao-ming, GUO Wen-tao, LIU Wei-hua. 亿博体育登陆注册网站[J]. Chinese Optics, 2023, 16(1): 61-75. doi: 10.37188/CO.2022-0022
Citation: TAN Man-qing, YOU Dao-ming, GUO Wen-tao, LIU Wei-hua. 亿博体育登陆注册网站[J]. Chinese Optics, 2023, 16(1): 61-75. doi: 10.37188/CO.2022-0022

亿博体育登陆注册网站

doi: 10.37188/CO.2022-0022
基金项目:国家自然科学基金资助项目(No. 61935018);国家电网公司科技项目(No. 5700-202058482A-0-0-00)
详细信息
    作者简介:

    谭满清(1967—),男,湖南衡阳人,博士,研究员,博士生导师,1996年于北京理工大学获得博士学位,主要从事半导体光电子器件和模块化方面的研究。E-mail:[email protected]

    游道明(1998—),男,江西上饶人,硕士研究生,2020 年于哈尔滨工业大学获得学士学位,主要从事半导体光电子器件及其集成技术方面的研究。E-mail:[email protected]

    郭文涛(1986—),男,山西运城人,博士,副研究员,2009 年于南昌大学应用物理学专业获得学士学位;2014 年于中国科学院半导体研究所微电子学与固体电子学专业获得博士学位,研究方向为用于光纤传感领域的半导体光电子器件。E-mail:[email protected]

  • 中图分类号:TN248.4

亿博体育登陆注册网站

Funds:Supported by National Natural Science Foundation of China (No. 61935018); Science and Technology Project of State Grid Corporation of China (No. 5700-202058482A-0-0-00)
More Information
  • 摘要:

    单片集成式主振荡功率放大器(MOPA)具有体积小、功率大、光束质量高等优势,通过集成布拉格光栅,还能够实现窄线宽和动态单模,在倍频、泵浦、光通信和传感等领域具有重要应用价值,是近年来半导体光电子器件的研究热点。本文梳理了单片集成式MOPA的主流结构,包括锥形、脊型、布拉格光栅型和三段式MOPA,以各自的工作原理和性能特征为出发点,介绍其主要的研究方向,并结合它们各自面临的问题介绍最新的发展趋势。针对单片集成式MOPA中普遍存在的高功率下光束质量退化的问题,梳理了近年在外延层结构、腔面光学薄膜和电极设置等方面的优化设计,重点总结了单片集成式MOPA在提高光束质量及高功率、容线宽及高亮度方面的重要进展。围绕不同领域的应用需求,整理了具备高功率、窄线宽、高光束质量和高亮度等性能特征的单片集成式MOPA的研究进展,最后展望了单片集成式MOPA的发展趋势。

  • 图 1 锥形MOPA结构示意图。(a)立体结构;(b)平面结构

    Figure 1. (a) Three-dimensional structure and (b) planar structure of a tapered-MOPA

    图 2 双锥形激光器结构示意图。(a)平面示意图;(b)立体结构示意图;(c)表面光栅的SEM剖面图;(d)表面光栅的SEM顶视图;(e)周期电注入示意图[ 33 ]

    Figure 2. Schematic diagram of double tapered laser. (a) Planar structure; (b) three-dimensional structure; (c) SEM profile of the surface grating; (d) top view of the SEM of surface grating; (e) periodic electric injection diagram[ 33 ]

    图 3 脊型MOPA的结构示意图

    Figure 3. Structure diagram of a ridge-amplifier MOPA

    图 4 弯曲脊型MOPA结构示意图[ 35 ]

    Figure 4. Structure diagram of a bent ridge-amplifier MOPA[ 35 ]

    图 5 布拉格光栅型MOPA结构示意图。(a)DBR型;(b)DFB型

    Figure 5. Structure diagrams of grating-MOPA. (a) DBR; (b) DFB

    图 6 双光栅型MOPA的结构示意图[ 47 ]

    Figure 6. Structure diagram of a double DBR grating MOPA[ 47 ]

    图 7 光栅型MOPA用于倍频的装置图[ 50 ]

    Figure 7. Schematic diagram of the frequency doubling setup with a MOPA[ 50 ]

    图 8 锥形光栅型MOPA结构示意图[ 52 ]

    Figure 8. Structure diagram of a MOPA with tapered grating[ 52 ]

    图 9 三段式MOPA结构示意图

    Figure 9. Structure diagram of three section MOPA

    图 10 外腔锁相MOPA结构示意图[ 60 ]

    Figure 10. MOPA-based external Cavity mode-locked laser[ 60 ]

    图 11 分离电极MOPA的结构示意图

    Figure 11. Diagram of separating electrode

    表  1 MOPA的主流结构和其特征及其面临的问题

    Table  1. Structures, characteristics and problems of main MOPAs

    MOPA类型 结构特征 性能特征 存在的问题
    锥形MOPA 锥形放大器 输出功率高 整形耦合难度大
    脊型MOPA 脊型放大器 光束质量高 输出功率低
    DBR-MOPA DBR光栅 窄线宽、输出功率高 光栅工艺复杂
    DFB-MOPA DFB光栅 窄线宽、光束质量高 光栅工艺复杂
    三段式MOPA 集成控制器 可调谐、多用途 电流控制难度大
    下载: 导出CSV

    表  2 大功率MOPA研究进展

    Table  2. Progress of high-power MOPA

    Year λ/nm P/W Key feature Refs.
    2010 1064 12 DFB ASLOC Embed [ 101 ]
    2011 1060 12 ASLOC6thDBR AR/AR [ 102 ]
    2016 1030 12.7 ASLOC3thDBR AR/AR [ 51 ]
    2017 1030 15.5 TQW ASLOC 7thDBR [ 94 ]
    2017 1030 10.5 ASLOC 7thDBR [ 93 ]
    2018 980 7.3 TPL PHC [ 84 ]
    2019 1060 9.5 ASLOC 7thDBR [ 29 ]
    2021 975 7 TPL [ 97 ]
    2022 785 7 DBR TPL [ 103 ]
    下载: 导出CSV

    表  3 窄线宽MOPA的研究进展

    Table  3. Progress of MOPAs with a narrow linewidth

    Year λ/nm Length/pm Grating feature Refs.
    2011 1 060 <10 DBR 6th surface [ 102 ]
    2015 1178 10 DBR 3th surface [ 10 ]
    2017 1030 17 DBR 7th surface [ 105 ]
    2019 996 2.4 DBR 44th surface [ 43 ]
    2019 980 2.7 DBR 44th surface [ 33 ]
    2021 785 1 DBR 10th surface [ 53 ]
    2021 783 19 DBR 10th surface [ 52 ]
    2022 785 19 DBR TPL [ 103 ]
    下载: 导出CSV

    表  4 高光束质量MOPA研究进展

    Table  4. Progress of MOPAs with high beam quality

    Year λ/nm M 2/1/e2 Key feature Refs.
    2010 1064 1.3 DFB ASLOC Embed [ 101 ]
    2011 660 1.5 TPL DQW [ 108 ]
    2016 1030 1.2 ASLOC 3thDBR AR/AR [ 51 ]
    2017 1030 1.1 TQW ASLOC 7thDBR [ 105 ]
    2017 1030 1.2 ASLOC 7thDBR AR/AR [ 93 ]
    2018 980 <2 TPL PBC [ 84 ]
    2019 980 1.5 TPL PBC narrow angle [ 26 ]
    2019 1060 1.1 ASLOC 7thDBR [ 109 ]
    2019 996 1.64 44thDFB ASLOC DQW [ 43 ]
    2019 980 1.7 44thDFB ASLOC DQW [ 33 ]
    2021 975 1.66 TPL [ 97 ]
    2021 1550 1.26 TPL noval package [ 110 ]
    下载: 导出CSV

    表  5 高亮度MOPA研究进展

    Table  5. Progress of MOPAs with high-brightness

    Year λ/nm Brightness/MWcm−2sr−1 Key feature Refs.
    2010 980 155(matrix) ASLOC TPL [ 91 ]
    2011 1 060 860(1/e2) TPL HR/AR [ 102 ]
    2016 1030 770(1/e2) TQW ASLOC [ 51 ]
    2017 1030 700(1/e2) TQW ASLOC [ 93 ]
    2017 1030 170(matrix) DFB special structure [ 94 ]
    2018 980 85.3(matrix) PHC TPL [ 84 ]
    2019 980 126.8(matrix) PHC narrow angle [ 85 ]
    2021 975 369(1/e2) TPL [ 97 ]
    下载: 导出CSV
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  • 收稿日期: 2022-02-07
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